发明名称 ALIGNING APPARATUS
摘要 [Subject] provided is a self-aligning device, including a rotation regulating tool with a simple and reasonable design structure. [Solution] the rotation regulating tool includes a joint frame surrounding a self-aligning member; a pair of first interlocking parts, formed in a relative position to an X-axis direction of the joint frame; a pair of second interlocking parts, formed in a relative position to an Y-axis direction; a pair of X-axis pins individually interlocked with the first interlocking parts by being formed in the device body in the X-axis direction; and a pair of Y-axis pins individually interlocked with the second interlocking parts by being formed in the self-aligning member in the Y-axis direction. The pins have a cylindrical shape. An inner wall of the interlocking parts has a slope surface, having a longitudinal width expanded towards a front end of the pins. A contact part, making contact with the pins, is placed in an end part of the slope surface.
申请公布号 KR20150129609(A) 申请公布日期 2015.11.20
申请号 KR20150062216 申请日期 2015.05.01
申请人 SMC CORPORATION 发明人 SHIMODA HIROMI;NISHIKAWA TAKESHI;ISHIBE JIRO
分类号 H01L21/52;H01L21/02;H01L21/677 主分类号 H01L21/52
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