| 摘要 |
PROBLEM TO BE SOLVED: To provide a degasser for performing a degassing treatment of a film by a roll-to-roll method, which is a degasser having a performance capable of performing the degassing treatment sufficiently, while a quality of a deposited thin film and an appearance quality of the film are not deteriorated, and capable of maintaining excellent production efficiency without lowering conveyance speed of the film.SOLUTION: A degasser has a roller group comprising 10 or more parallel rollers inside a vacuum chamber for performing therein a degassing treatment of a film. |
