| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming method that prevents the deposition of sputter particles on both edges of an outer peripheral surface of a can roll while continuously and stably forming a film on both ends in the width direction of a substrate so as to have the same thickness as that at a central part of the substrate.SOLUTION: In a film forming method where a long resin film F conveyed by a roll-to-roll method is wound on an outer peripheral surface of a can roll 56 having the outer peripheral surface wider than the width of the film F and provided with a cooling mechanism to form a metal thin film on the surface of the resin film F by a dry plating method while cooling the resin film F, a pair of long thin film materials 71a, 71b are conveyed parallel to the conveyance direction of the resin film F by a roll-to-roll method so as to cover both edges of the outer peripheral surface not wound by the resin film F and to be respectively interposed between the resin film F and the outer peripheral surface on both edges in the width direction of the resin film F. |
