POSITION CONTROL APPARATUS, POSITION CONTROL METHOD, OPTICAL APPARATUS, AND IMAGING APPARATUS

摘要

A target generating unit outputs a target value signal of a control target, and a position encoding processing unit outputs a position detection signal of the control target. A PID compensator calculates a control amount for causing the control target to follow a target position based on a difference signal between the target value signal and the position detection signal, and outputs it to an adding unit. A disturbance estimation observer outputs the result of estimation of disturbance to the adding unit. The adding unit adds the control amount output of the PID compensator to the output of the disturbance estimation observer to calculate a total control amount. A storage unit stores a control amount during position control to a fixing position as an attitude difference correction amount, and the disturbance estimation observer performs disturbance estimation using a control amount obtained by subtracting a value stored in the storage unit during position control to a moving position from the total control amount.

主权项

1. A position control apparatus comprising:
a calculating unit configured to calculate a control amount for causing a control target to follow a target position in response to a detected position of the control target; a control unit configured to control the control target in response to the control amount calculated by the calculating unit or a total control amount obtained by adding the control amount to a disturbance cancellation control amount corresponding to an amount of movement of the control target; and a storage unit configured to store an attitude difference correction amount which is a control amount for maintaining a stopped state if the control target is in the stopped state, wherein the disturbance cancellation control amount is furthermore a control amount which corresponds to a control amount obtained by computing the attitude difference correction amount stored in the storage unit from the total control amount during position control for causing the control target to follow a moving target.