| 摘要 |
PROBLEM TO BE SOLVED: To provide a function element capable of having excellent temperature characteristics.SOLUTION: A function element 100 includes: a substrate 10 provided with a recess portion 12; stationary portions 30a and 30b connected to a wall portion 13 defining the recess portion 12 of the substrate 10; elastic portions 40 and 44 extending from the stationary portions 30a and 30b and being capable of expanding and contracting in a first axial direction; a movable body 20 connected to the elastic portions 40 and 44; movable electrode sections 50 and 52 extending from the movable body 20; and fixed electrode sections 60, 62, 64 and 66 being connected to the substrate 10 and extending in an extension direction of the movable electrode sections 50 and 52. The recess portion 12 has notch portions 16 provided on the wall portion 13. The stationary portions 30a and 30b have overlapping portions 32 being spaced apart from the substrate 10 and overlapping with the recess portion 12 as viewed in a plan view. At least parts of the overlapping portions 32 overlap with the notch portions 16 as viewed in the plan view. The elastic portions 40 and 44 extend from the overlapping portions 32. |
