| 摘要 |
The invention relates to a MEMS loudspeaker (1) for generating sound waves in the audible wavelength spectrum, having a carrier substrate (2) which has a substrate cavity (6) with two substrate openings (7, 8) formed on two opposite sides of the carrier substrate (2), an actuator structure (3), in particular a piezoelectric actuator structure, which is arranged in the region of one of the two substrate openings (7, 8) and is connected to the carrier substrate (2) in the edge region thereof, and a diaphragm (4) which is anchored in the edge region thereof and can be caused to vibrate by means of the actuator structure (3) for the purpose of generating sound waves. According to the invention, the diaphragm (4) is spaced apart from the actuator structure (3) in a cross-sectional view of the MEMS loudspeaker (1), with the result that an intermediate cavity (13) is formed between the diaphragm and the actuator structure. The MEMS loudspeaker (1) also has a coupling element (5) which is arranged in the intermediate cavity (13), connects the actuator structure (3) to the diaphragm (4) and can vibrate, with the actuator structure and the diaphragm, with respect to the carrier substrate (2). |
