发明名称 |
APPLICATION OF ELECTRON-BEAM INDUCED PLASMA PROBES TO INSPECTION, TEST, DEBUG AND SURFACE MODIFICATIONS |
摘要 |
An electron-beam induced plasmas is utilized to establish a non-mechanical, electrical contact to a device of interest. This plasma source may be referred to as atmospheric plasma source and may be configured to provide a plasma column of very fine diameter and controllable characteristics. The plasma column traverses the atmospheric space between the plasma source into the atmosphere and the device of interest and acts as an electrical path to the device of interest in such a way that a characteristic electrical signal can be collected from the device. Additionally, by controlling the gases flowing into the plasma column the probe may be used for surface modification, etching and deposition. |
申请公布号 |
WO2015051175(A3) |
申请公布日期 |
2015.11.19 |
申请号 |
WO2014US58899 |
申请日期 |
2014.10.02 |
申请人 |
ORBOTECH LTD. |
发明人 |
SALEH, NEDAL;TOET, DANIEL;STERLING, ENRIQUE;LOEWINGER, RONEN;KRISHNASWAMI, SRIRAM;GLAZER, ARIE |
分类号 |
G01R31/308 |
主分类号 |
G01R31/308 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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