THINNING METHOD FOR PYROELECTRIC RELAXOR FERROELECTRIC SINGLE CRYSTAL

摘要

A thinning method for a pyroelectric relaxor ferroelectric single crystal, comprising rough grinding being performed on a first surface of a single crystal and chemical mechanical polishing being performed on the rough-ground first surface, rough grinding being performed on a second surface of the single crystal and chemical mechanical polishing being performed on the rough-ground second surface, wet etching being performed on the ground single crystal, and high temperature annealing treatment being performed on the etched single crystal. A combination of grinding, etching and annealing is used, attaining effective thinning of pyroelectric relaxor ferroelectric single crystal material, and ensuring the performance of the material after thinning.