发明名称 BAW Component and Method for Manufacturing a BAW Component
摘要 A BAW component is provided. A method for manufacturing a BAW component is also provided. The component includes a bottom electrode, a top electrode and a first piezoelectric material. The first piezoelectric material is between the bottom electrode and the top electrode. The first piezoelectric material has a higher piezoelectric coefficient than AlN.
申请公布号 US2015333249(A1) 申请公布日期 2015.11.19
申请号 US201214654480 申请日期 2012.12.21
申请人 EPCOS AG 发明人 Moulard Gilles;Muralt Paul;Matloub Ramin;Metzger Thomas
分类号 H01L41/083;H01L41/27;H01L41/18 主分类号 H01L41/083
代理机构 代理人
主权项
地址 Muenchen DE