发明名称 |
BAW Component and Method for Manufacturing a BAW Component |
摘要 |
A BAW component is provided. A method for manufacturing a BAW component is also provided. The component includes a bottom electrode, a top electrode and a first piezoelectric material. The first piezoelectric material is between the bottom electrode and the top electrode. The first piezoelectric material has a higher piezoelectric coefficient than AlN. |
申请公布号 |
US2015333249(A1) |
申请公布日期 |
2015.11.19 |
申请号 |
US201214654480 |
申请日期 |
2012.12.21 |
申请人 |
EPCOS AG |
发明人 |
Moulard Gilles;Muralt Paul;Matloub Ramin;Metzger Thomas |
分类号 |
H01L41/083;H01L41/27;H01L41/18 |
主分类号 |
H01L41/083 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Muenchen DE |