发明名称 ON-END EFFECTOR MAGNETIC WAFER CARRIER ALIGNMENT
摘要 Embodiments include methods and apparatuses for transferring and aligning a carrier ring. In an embodiment, a method includes lifting the carrier ring from a first location with a robot arm that includes an end effector wrist and an end effector. Front dowel pins and rear dowel pins are coupled to the end effector. In an embodiment, the end effector wrist includes a plunger that has a gripping device. Embodiments include securing the plunger to the carrier ring with the gripping device and extending the plunger out from the end effector wrist until the carrier ring contacts the front dowel pins. Thereafter, the carrier ring is transferred from the first location to the second location. The plunger and the carrier ring are then retracted until the rear dowel pins engage an alignment notch and an alignment flat on the carrier ring.
申请公布号 WO2015175714(A1) 申请公布日期 2015.11.19
申请号 WO2015US30654 申请日期 2015.05.13
申请人 APPLIED MATERIALS, INC. 发明人 MAZZOCCO, JOHN;GREENBERG, DANIEL;YAYA, BRIAN ALDWIN
分类号 H01L21/677 主分类号 H01L21/677
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