Resistance-Switching Memory Cell With Multiple Raised Structures In A Bottom Electrode

摘要

A reversible resistance-switching memory cell has multiple narrow, spaced apart bottom electrode structures. The raised structures can be formed by coating a bottom electrode layer with nano-particles and etching the bottom electrode layer. The raised structures can be independent or joined to one another at a bottom of the bottom electrode layer. A resistance-switching material is provided between and above the bottom electrode structure, followed by a top electrode layer. Or, insulation is provided between and above the bottom electrode structures, and the resistance-switching material and top electrode layer are above the insulation. Less than one-third of a cross-sectional area of each resistance-switching memory cell is consumed by the one or more raised structures. When the resistance state of the memory cell is switched, there is a smaller area in the bottom electrode for a current path, so the switching resistance is higher and the switching current is lower.

主权项

1. A resistance-switching memory cell, comprising:
a substrate; a bottom electrode layer above the substrate, the bottom electrode layer comprising a plurality of raised structures; a resistance-switching material, a top of each raised structure of the plurality of raised structures is in contact with the resistance-switching material; a top electrode above the resistance-switching material; and an insulating material adjacent to and between the plurality of raised structures, wherein a top of the insulating material is below the top of each raised structure of the plurality of raised structures and the resistance-switching material extends above the plurality of raised structures and the insulating material.