CLEANING SYSTEM AND CLEANING METHOD USING NON-AZEOTROPIC CLEANING AGENT COMPOSITION

摘要

The present invention relates to a cleaning system provided with a boiling tank which accommodates a cleaning agent composition including a first component and a second component, has an object to be cleaned immersed in the boiling tank, and generates vapor of the first component, a collecting portion which liquefies the first component vapor generated by the boiling tank and collects the liquid, and a water separator which separates water from the collected liquid collected by the collecting portion and extracts the first component, said cleaning system being characterized in that: the first component has a boiling point of 30-100 °C and a vapor specific gravity that is greater than air; the second component has a boiling point that is at least 50 °C higher than the boiling point of the first component; the first component and second component are compatible but are not azeotropic; and the first component extracted by the water separator is supplied to the boiling tank. Therein, the first component is at least one type of fluorine solvent selected from the group consisting of hydrofluorocarbons and hydrofluoroethers, and the second component is a C12-C20 unsaturated fatty acid alkyl ester.