| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface flaw inspection device and a surface flaw inspection method capable of surely detecting a pattern-like scab defect having no remarkable irregularity such as a crack, a protrusion, and curling-up of the surface in the inspection surface and achieving a high defect detection accuracy, and also capable of being sufficiently assembled into a quality inspection line of a product.SOLUTION: A surface flaw inspection device includes: a linear diffusion light source for making polarized light including both of p and s components on the inspection surface enter; and light reception means for receiving light which extracts a mirror surface diffusion reflection component from among a mirror surface reflection component and a mirror surface diffusion component included in the diffusion reflection light from the inspection surface. The light reception means includes a 1/4 wavelength plate and an analyzer adjusted respectively in a direction to extract the mirror surface diffusion reflection light included in the diffusion reflection light. |
