DRY-ETCHING JIG FOR PIEZOELECTRIC SUBSTRATES, PIEZOELECTRIC ELEMENT MANUFACTURED BY USE THEREOF, AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide: a dry-etching jig for piezoelectric substrates, by which the micromachining of a potassium sodium niobate lithium piezoelectric thin film in a dry etching step can be uniformized in a piezoelectric substrate plane; a piezoelectric element manufactured by use of such a dry-etching jig; and a manufacturing method thereof.SOLUTION: A dry-etching jig 100 for piezoelectric substrates serves to support a piezoelectric substrate including a potassium sodium niobate lithium piezoelectric thin film when dry etching the piezoelectric substrate. The dry-etching jig 100 comprises: a jig main body 101 shaped in a flat plate form; a setting hole 102 which is formed in a center portion of the jig main body 101 and sets the piezoelectric substrate; and a protection part 103 formed on the inner edge of the setting hole 102, and serving to cover the outer edge of the piezoelectric substrate.