FLOW GUIDE DEVICE FOR DUAL-ELECTRODE DISCHARGE CAVITY, DUAL ELECTRODE DISCHARGE CAVITY UTILIZE THE SAME AND EXCIMER LASER

摘要

The present disclosure proposes a flow guide device for a discharge cavity having a symmetrical configuration and including two pairs of electrodes; the flow guide device comprises two rotors which correspond to one pair of the two pairs of electrodes, respectively, installed positions of which are symmetrical about a symmetrical plane of the discharge cavity and is beneath the electrodes, a rotational axis of which is parallel to an axial direction of the electrodes which is parallel to a base plane of the discharge cavity, and the two rotors have opposite rotation directions and identical rotation speeds. The flow guide device further comprises a spoiler plate and a flow guide plate so that the discharge gas flow passes through the discharge cavity in a manner of high speed and uniform cycling when flowing through the discharge region. Thus, the discharge quality is guaranteed so as to improve the energy and reliability of the laser.

主权项

1. A flow guide device for a discharge cavity having a symmetrical configuration and including two pairs of electrodes, wherein
the flow guide device comprises two rotors which correspond to one pair of the two pairs of electrodes, respectively; installed positions of the rotors are symmetrical about a symmetrical plane of the discharge cavity and are beneath the electrodes; a rotational axis of the rotors is parallel to an axial direction of the electrodes which is parallel to a base plane of the discharge cavity, and the two rotors have opposite rotation directions and identical rotation speeds.