发明名称 TRANSPORT SYSTEM AND TRANSPORT METHOD
摘要 In a transport system, overhead travelling vehicles each including a hoist travel along an overhead travelling vehicle travelling route. A local vehicle travelling route is disposed under the overhead travelling vehicle travelling route and over load ports at a position higher than the load ports. Local vehicles each including hoist travel along the local vehicle travelling route. Buffers are disposed along the local vehicle travelling route. The local vehicle travelling route includes a plurality of local vehicle travelling routes that are provided in parallel, and the local vehicles are configured to diverge and merge from one local vehicle travelling route to another local vehicle travelling route. The local vehicles transport articles between a load port and a buffer under control of a controller. The overhead travelling vehicles, under control of the controller, transfer articles to and from a load port or a buffer and transport articles between a load port or a buffer and a section other than the local vehicle travelling routes.
申请公布号 US2015332948(A1) 申请公布日期 2015.11.19
申请号 US201414277111 申请日期 2014.05.14
申请人 MURATA MACHINERY, LTD. 发明人 IKEDA Masahiro;FUKUSHIMA Masazumi;ITO Yasuhisa
分类号 H01L21/677;B66C19/00 主分类号 H01L21/677
代理机构 代理人
主权项
地址 Kyoto-shi JP