发明名称 METHOD FOR PREPARING TRICHLOROSILANE
摘要 The present invention relates to a method for preparing trichlorosilane. According to the method for preparing trichlorosilane of the present invention, trichlorosilane may be obtained with improved yield using silicon where copper silicide is formed.
申请公布号 US2015329367(A1) 申请公布日期 2015.11.19
申请号 US201414650620 申请日期 2014.02.26
申请人 HANWHA CHEMICAL CORPORATION 发明人 Kim Gil Ho;Ahn Gui Ryong;Lee Won Ik;Kim Joon Hwan;Cho Kyung Hoon
分类号 C01B33/107 主分类号 C01B33/107
代理机构 代理人
主权项 1. A method for preparing trichlorosilane comprising heat treating silicon (Si) and a copper (Cu) compound to a temperature equal to or more than the melting point of the copper compound to form copper silicide (Cu-silicide) on the silicon; and supplying silicon tetrachloride and hydrogen to the silicon where Cu-silicide is formed to conduct a hydrochlorination reaction.
地址 Seoul KR