MEMS ACOUSTIC TRANSDUCER, AND ACOUSTIC TRANSDUCER ASSEMBLY HAVING A STOPPER MECHANISM

摘要

The invention relates to a MEMS acoustic transducer (2) for generating and/or registering acoustic waves in the audible wavelength spectrum, comprising: a diaphragm carrier (40); a diaphragm (30) which is connected by its edge region (37) to the diaphragm carrier, and which can oscillate in relation to the diaphragm carrier along a Z-axis (50); and a stopper mechanism (60) that limits the oscillations of the diaphragm in at least one direction (51). According to the invention, the MEMS acoustic transducer is characterised in that the stopper mechanism has: at least one reinforcing element (31) arranged on one side of the diaphragm; and a stop (61) opposite the reinforcing element, which is at a distance from the diaphragm when said diaphragm is in a neutral position, and against which the reinforcing element impinges in the case of maximum deflection. The invention also relates to an acoustic transducer assembly (1) having a MEMS acoustic transducer (2) of this type.