DESIGN TO MANAGE STATIC CHARGE AND DISCHARGE OF WAFERS AND WAFER CARRIER RINGS

摘要

Embodiments of the invention include methods and apparatuses for removing charge from a carrier ring assembly. Embodiments include picking up a carrier ring assembly from a first location with an end effector. The charge is removed from the carrier ring assembly by one or more charge regulating surfaces formed on an end effector. According to an embodiment the charge regulating surfaces may be pads formed above top surfaces of an end effector blade. Embodiments include charge regulating surfaces that cover the entire surface of the end effector blade. Embodiments include removing charge from a carrier ring of an end effector assembly, and from a substrate supported on a conductive adhesive backing tape surrounded by the carrier ring. In an embodiment, the carrier ring assembly is then transferred to a second location with the end effector.