发明名称 CARRYING MECHANISM
摘要 PROBLEM TO BE SOLVED: To configure a carrying robot by an inexpensive carrying mechanism, and to facilitate the repair or adjustment of the carrying mechanism.SOLUTION: A carrying mechanism is composed of a carrying robot 20 equipped with a holding unit 21 holding platy work W, and a moving unit 24 moving the holding unit 21 in a vertical direction and a horizontal direction; and a traveling unit 24 which makes the carrying robot 20 travel in a linearly traveling direction. While the carrying robot 20 is made to travel in a traveling direction by the traveling unit 24, the holding unit 21 is swiveled toward a carrying destination by a swiveling portion 28 of the moving unit 24, thereby carrying the platy work held by the holding unit 21 to the carrying destination. Therefore, the carrying robot 20 can be configured by the inexpensive carrying mechanism, and the structure of the carrying mechanism is simplified to facilitate the repair or adjustment of the carrying mechanism.
申请公布号 JP2015207622(A) 申请公布日期 2015.11.19
申请号 JP20140086265 申请日期 2014.04.18
申请人 DISCO ABRASIVE SYST LTD 发明人 YASUDA YUKI
分类号 H01L21/677;B24B41/06;B25J9/06;B65G49/07 主分类号 H01L21/677
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