| 发明名称 |
MEMS STRUCTURE AND METHOD OF MANUFACTURING THE SAME |
| 摘要 |
There are provided a micro electro mechanical systems (MEMS) structure and a method of manufacturing the same. The MEMS structure includes: a middle structure including an insulating layer, a circuit layer formed on the insulating layer, a mass formed beneath the insulating layer, and supports formed so as to be spaced apart from sides of the mass, and having corner portions of sides formed in a concave shape; an upper structure formed so as to enclose an upper portion of the middle structure; and a lower structure formed so as to enclose a lower portion of the middle structure. |
| 申请公布号 |
US2015329356(A1) |
申请公布日期 |
2015.11.19 |
| 申请号 |
US201514711454 |
申请日期 |
2015.05.13 |
| 申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
HAN Jong Woo;KIM Sun Ho;PARK Heung Woo |
| 分类号 |
B81C1/00;B81B3/00 |
主分类号 |
B81C1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A micro electro mechanical systems (MEMS) structure comprising:
a middle structure including an insulating layer, a circuit layer formed on the insulating layer, a mass formed beneath the insulating layer, and supports formed so as to be spaced apart from sides of the mass, and having corner portions of sides formed in a concave shape; an upper structure formed so as to enclose an upper portion of the middle structure; and a lower structure formed so as to enclose a lower portion of the middle structure. |
| 地址 |
Suwon-Si KR |
