POLISHING TABLE REPLACEMENT APPARATUS, METHOD FOR REPLACING POLISHING TABLE, AND DEVICE FOR REPLACING CONSTITUENT PART OF SEMICONDUCTOR DEVICE PRODUCTION APPARATUS

摘要

Disclosed is an apparatus for replacing a polishing table that is used in a polishing apparatus for polishing substrates such as wafers. This polishing table replacement apparatus (10) is an apparatus for removing a polishing table (3) from a polishing apparatus (1). This polishing table replacement apparatus (10) is provided with a crane (12) for moving the polishing table (3) in the vertical direction and horizontal direction, a table stage (14) on which the polishing table (3) is carried, and a table stage tilting mechanism (15) for tilting the table stage (14) with respect to the horizontal direction.