发明名称 PHOTOELECTRIC CONVERSION ELEMENT AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a photoelectric conversion element capable of reducing influence of light reflection on a surface of an upper layer of a photoelectric conversion part, and to provide a method for manufacturing the same.SOLUTION: A photoelectric conversion element 100 comprises a photoelectric conversion region 101 in which a photoelectric conversion part is arranged, an antireflection region 102, and an electrode pad region 103 in which electrode pads are arranged. The photoelectric conversion element also includes a layer whose surface roughness is not less than RMS50 nm. A method for manufacturing the photoelectric conversion element includes the steps of: forming a layer including an organic compound and particles dispersed in the organic compound on a member including the photoelectric conversion part; and roughening a surface of the layer by dry etching.
申请公布号 JP2015207638(A) 申请公布日期 2015.11.19
申请号 JP20140086800 申请日期 2014.04.18
申请人 CANON INC 发明人 KURIHARA MASAKI
分类号 H01L27/14;H01L21/3065;H01L31/08 主分类号 H01L27/14
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