发明名称 |
PACKAGE, ELECTRONIC DEVICE, MANUFACTURING METHOD OF ELECTRONIC DEVICE, ELECTRONIC APPARATUS AND MOVABLE BODY |
摘要 |
PROBLEM TO BE SOLVED: To provide a package improving airtightness.SOLUTION: A package comprises: a storage space portion 56; and a first substrate 50 forming at least a part of the storage space portion 56. A first through-hole 58 extending from a first principal surface 51 of an opposite side to the storage space portion 56 toward a second surface 52 of the storage space portion 56 side is provided in the first substrate 50. The first through-hole 58 has a first inclined portion 71 inclined from the second surface 52 toward the first principal surface 51 and a second inclined portion 72 inclined from one end of the first principal surface 51 side of the first inclined portion 71 toward the first principal surface 51 in a sectional view of the first through-hole 58. A second angle &thetas;2 between the second inclined portion 72 and the second surface 52 is greater than a first angle &thetas;1 between the first inclined portion 71 and the second surface 52, and the first through-hole 58 is sealed with a seal member 70. |
申请公布号 |
JP2015207727(A) |
申请公布日期 |
2015.11.19 |
申请号 |
JP20140088893 |
申请日期 |
2014.04.23 |
申请人 |
SEIKO EPSON CORP |
发明人 |
NARUSE ATSUNORI |
分类号 |
H01L23/02;G01P15/08;H01L29/84 |
主分类号 |
H01L23/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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