| 摘要 |
PROBLEM TO BE SOLVED: To provide a holding jig capable of suppressing the adhesion of dust or the like to a device and a method for processing a workpiece.SOLUTION: A holding jig 1 has a holding surface 1a where a plurality of fine bottomed holes 2 are formed. The holding surface 1a is coated with an elastic member layer 3. A method for processing a workpiece includes a holding jig fixing step, a cutting step, an adhesive tape adhering step and a workpiece separation step. In a holding jig fixing step, a workpiece W is placed on the holding surface 1a in a vacuum atmosphere and then is taken out into the atmosphere. In a cutting step, the workpiece W is held on a chuck table via the holding jig 1 and the workpiece W is cut with a cutting blade. In an adhesive tape adhering step, an adhesive tape is adhered to an exposed surface WS of the workpiece W fixed on the holding jig 1 and the outer periphery of the adhesive tape is held with an annular frame. In a workpiece separation step, the holding jig 1 is separated from the workpiece W in a vacuum atmosphere. |
