| 摘要 |
PROBLEM TO BE SOLVED: To provide a prober or the like capable of inspecting an electronic element having an electrode on both of front and rear surfaces.SOLUTION: A probe includes: a stage 6 which is used for placing thereon a holding sheet 51 to which the surface having a second electrode 61 is stuck by a photodiode 5 having a first electrode 60 and the second electrode 61 on each of two surfaces facing back to back each other; a first contact probe 8 capable of being in contact with the first electrode 60 equipped on the upper side surface of the photodiode 5 when a stage 6 is equipped with a pore 28 and the holding sheet 51 is placed on the stage 6; and a second contact probe 21 capable of being in contact with the second electrode 61 equipped with the lower side surface of the photodiode 5 from the inside of the pore 28. The tip 72 of the second contact probe 21 has a pointed shape capable of being penetrated through the holding sheet 51. |
