| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump in which a rotor cylindrical part is strongly connected to a rotor base part.SOLUTION: A rotor of a turbo molecular pump according to the present invention includes a rotor base part 21 and a rotor cylindrical part 24. The rotor cylindrical part 24 is connected to a connection part 23 extending from the rotor base part 21 by pressure bonding. Unevenness BD is provided on an outer peripheral surface 230a of a connection part body 230 of the connection part 23 by blasting. |
