| 摘要 |
An ingot growing apparatus is provided. The ingot growing apparatus, according to one embodiment of the present invention, comprises: a main chamber including a crucible for accommodating raw materials and a heater for heating the crucible so as to melt the raw materials; a dome chamber provided at the upper part of the crucible; a pull chamber provided at the upper part of the dome chamber; a seed cable for moving ingot, grown in the crucible, inside the dome chamber and the pull chamber; and a weight measuring part provided at the upper part of the pull chamber so as to operate the seed cable, wherein the weight measuring part comprises: a housing provided at the upper part of the pull chamber, and of which the inner part is maintained in a vacuum state; a support roller provided inside the housing so as to support the seed cable; and a load cell provided at the outer side of the housing so as to measure the weight of the ingot supported by the support roller. |
