POSITIONING DEVICE

摘要

The present invention is provided with an image processing unit (4) for outputting a position measurement value for a positioning subject (10) on the basis of an image obtained by an imaging unit (3), a measurement error estimation unit (5) for outputting an estimated value of a measurement error in a position measurement value on the basis of position measurement values from a plurality of position measurements, an error comparison unit (6) for comparing the size of the estimated value of the measurement error and a target error and outputting an error comparison result, a positioning parameter setting unit (7) for updating a positioning parameter on the basis of the error comparison result, a repeated processing unit (8) for repeatedly executing the updating of the positioning parameter by the positioning parameter setting unit (7) until a pre-set repetition end condition is satisfied, and a positioning control unit (9) for positioning a table (1) in accordance with a positioning condition set on the basis of the positioning parameter.