| 发明名称 |
MODE SIZE CONVERTERS AND METHODS OF FABRICATING THE SAME |
| 摘要 |
One aspect of the invention provides a method of fabricating a mode size converter. The method includes: exposing a photoresist-coated substrate to varying doses of light exposure to produce a profile in the photoresist of a beam mode size converter; and etching the photoresist-coated substrate to remove an equal thickness of the photoresist and substrate. The beam mode sized converter includes: a first surface having a first surface height and a first surface width; a second surface opposite the first surface, the second surface having a second surface height different than the first surface height and a second surface width different than the first surface width; and one or more boundary surfaces connecting the first surface and second surfaces. |
| 申请公布号 |
US2015331189(A1) |
申请公布日期 |
2015.11.19 |
| 申请号 |
US201414279515 |
申请日期 |
2014.05.16 |
| 申请人 |
Tyco Electronics Corporation |
发明人 |
Sun Jibin;Zhang Haipeng;Razdan Sandeep;Pugliano Nicola |
| 分类号 |
G02B6/14 |
主分类号 |
G02B6/14 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of fabricating a mode size converter, the method comprising:
exposing a photoresist-coated substrate to varying doses of light exposure to produce a profile in the photoresist of a beam mode size converter including:
a first surface having a first surface height and a first surface width;a second surface opposite the first surface, the second surface having a second surface height different than the first surface height and a second surface width different than the first surface width; andone or more boundary surfaces connecting the first surface and second surfaces; and etching the photoresist-coated substrate to remove an equal thickness of the photoresist and substrate. |
| 地址 |
Berwyn PA US |
