MEASUREMENT DEVICE

摘要

A measurement device includes a stage for carrying an object to be measured, an insulating board having a through hole, a probe fixed on the undersurface of the insulating board, a side wall section in a shape surrounding the probe, a pressurizing section provided on the top surface of the insulating board, the pressuring section supplying a gas below the insulating board via the through hole, and a measurement section electrically connected to the probe to control the pressurizing section, wherein the measurement section measures an electric property of the object to be measured via the probe in a state where the pressurizing section is controlled to supply a gas to a measurement space located below the insulating board to increase a pressure in the measurement space, the measurement space surrounded by the stage, the side wall section, and the insulating board.

主权项

1. A measurement device, comprising:
a stage for carrying an object to be measured; an insulating board having a through hole; a probe fixed on the undersurface of said insulating board; a side wall section in a shape surrounding said probe; a pressurizing section provided on the top surface of said insulating board, the pressuring section supplying a gas below said insulating board via said through hole; and a measurement section electrically connected to said probe to control said pressurizing section, wherein: said measurement section measures an electric property of said object to be measured via said probe in a state where said pressurizing section is controlled to supply a gas to a measurement space located below said insulating board to increase a pressure in said measurement space, the measurement space surrounded by said stage, said side wall section, and said insulating board.