| 摘要 |
PROBLEM TO BE SOLVED: To simplify an inspection process.SOLUTION: A first connection member 41 for only mechanically connecting a sensor chip 10 to a circuit chip 20 is disposed between the sensor chip 10 and the circuit chip 20. The sensor chip 10 is electrically connected to the circuit chip 20 via a bonding wire 51. Thus, by visually inspecting the connection part between the bonding wire 51 and the sensor chip 10 and circuit chip 20, it can be inspected whether the sensor chip 10 is electrically connected to the circuit chip 20, and the inspection process can be simplified. |
