发明名称 HIGH ASPECT RATIO X-RAY TARGET AND USE OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an x-ray target, a method of using the x-ray target, and a computer program product including instructions for carrying out a method of using the x-ray target.SOLUTION: An x-ray target of the present invention includes a substrate made from a soft x-ray producing material, and a high aspect ratio structure made from a hard x-ray producing material. The hard x-ray producing material is embedded in the substrate, formed on the substrate, cantilevered out from the edge of the substrate, or any combination thereof. The high aspect ratio structure comprises a plurality of high aspect ratio structures arranged in one or more grids or arrays, and the high aspect ratio structures in one of the one or more grids or arrays are arranged to form a Hadamard matrix structure.
申请公布号 JP2015207559(A) 申请公布日期 2015.11.19
申请号 JP20150085117 申请日期 2015.04.17
申请人 FEI CO 发明人 PARKER N WILLIAM;UTLAUT MARK W;LAURENS FRANZ TAEMSZ KWAKMAN;THOMAS G MILLER
分类号 H01J35/08;G01N23/04;H05G1/00;H05G1/70 主分类号 H01J35/08
代理机构 代理人
主权项
地址
您可能感兴趣的专利