发明名称 半導体装置
摘要 PROBLEM TO BE SOLVED: To realize plasmon resonance in a room temperature condition more easily by using a field effect transistor in which a two-dimensional electron layer is a channel.SOLUTION: A semiconductor device includes a beam structure 104 comprising a first barrier wall layer 101, a channel layer 102, and a second barrier wall layer 103, and a gate electrode 106 is formed through a gate insulation layer 105, in a state of surrounding a periphery of the beam structure 104. An extension direction of the beam structure 104 is a channel length direction. The gate electrode 106 is arranged in a state of surrounding the entire periphery of a channel extending in the extension direction of the beam structure 104.
申请公布号 JP2015207651(A) 申请公布日期 2015.11.19
申请号 JP20140087091 申请日期 2014.04.21
申请人 发明人
分类号 H01L21/338;H01L21/336;H01L21/337;H01L29/778;H01L29/78;H01L29/808;H01L29/812 主分类号 H01L21/338
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