| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room facility capable of preventing odorous gas and toxic gas generated from a process device in a booth from leaking and maintaining cleanliness in the booth.SOLUTION: A clean room facility comprises: a clean room 10; a first booth 21 which is installed in the clean room 10; and a second booth 22 which is installed in the clean room 10 and allows interior air thereof to be communicated with the same in the clean room 10 and the first booth 21. The first booth 21 has a process device 100 which generates at least either odorous gas or toxic gas. In the clean room facility, pressure Pc in the clean room 10, the pressure P1 in the first booth 21 and the pressure P2 in the second booth 22 satisfy a relation expression: P1>Pc>P2. |
