发明名称 DEVICE FOR VERTICAL GALVANIC METAL, PREFERABLY COPPER, DEPOSITION ON A SUBSTRATE AND A CONTAINER SUITABLE FOR RECEIVING SUCH A DEVICE
摘要 The present invention is related to a device for vertical galvanic metal, preferably copper, deposition on a substrate, a container suitable for receiving such a device and a substrate holder, which is suitable for receiving a substrate to be treated, and the use of such a device inside of such a container for galvanic metal, in particular copper, deposition on a substrate.
申请公布号 US2015329985(A1) 申请公布日期 2015.11.19
申请号 US201314649003 申请日期 2013.12.03
申请人 ATOTECH DEUTSCHLAND GMBH 发明人 RAUENBUSCH Ralph;THOMAS Christian;WEINHOLD Ray;KLINGL Heinz
分类号 C25D17/06 主分类号 C25D17/06
代理机构 代理人
主权项
地址 Berlin DE