ELECTROSTATIC CHUCK DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a highly reliable electrostatic chuck device.SOLUTION: An electrostatic chuck device comprises: an electrostatic chuck portion which has a first surface where a plate specimen is placed and a second surface opposite to the first surface, and which incorporates an internal electrode for electrostatic adsorption; a cooling base part arranged on the second surface and cools the electrostatic chuck portion; a resin layer interposed between the electrostatic chuck portion and the cooling base part to bond both; a heating member fixed on the second surface of the electrostatic chuck portion; an electrode pin which is inserted through a through hole penetrating the cooling base part in a thickness direction and whose front end is connected to the heating member; a stress relaxation layer disposed on the outer periphery of the electrode pin; and an electrostatic chuck device including a peripheral resin layer extending between the inner periphery of the through hole and the outer periphery of the stress relaxation layer from the resin layer.