发明名称 MULTILAYER CERAMIC SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To suppress the shrinkage of a green sheet owing to space portions at sintering.SOLUTION: A method for manufacturing a multilayer ceramic substrate comprises: a lamination process for obtaining a green sheet laminate; and a sintering process. The lamination process includes: a first step of preparing at least one green sheet with at least one of hole parts and grooves which form space portions; a second step of forming a first layer so as to cover each region to be exposed at least in each space portion, provided that the region is located on a surface of the at least one green sheet; a third step of laminating the at least one green sheet, thereby obtaining the green sheet laminate with the first layer exposed in each space portion; and a fourth step of forming a second layer so as to cover each of upper and lower surfaces of the green sheet laminate prior to the sintering step. A material of the first layer is lower than a material of the green sheet in glass yield point. A crystallization temperature of the material of the first layer is lower than a softening point of the material of the green sheet.
申请公布号 JP2015207578(A) 申请公布日期 2015.11.19
申请号 JP20140085279 申请日期 2014.04.17
申请人 NGK SPARK PLUG CO LTD 发明人 KATO TATSUYA;KUTSUNA MASAKI;ITO MASANORI
分类号 H05K3/46;H01L23/12 主分类号 H05K3/46
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