发明名称 |
IMAGE ACQUISITION SYSTEM, IMAGE ACQUISITION METHOD, AND INSPECTION SYSTEM |
摘要 |
The invention relates to an image acquisition system and an image acquisition method, as well as to an inspection system having at least one such image acquisition system. A projector projects a pattern on a surface of a sample, a camera records light intensity information from within at least two detection fields defined by the camera on the surface of the sample. A relative motion between the sample on the one hand and the camera and projector on the other hand is generated. From the acquired at least one image a height profile of the surface of the sample may be inferred. The pattern may comprise a number of sub-patterns related to each other by a phase shift. Alternatively, the pattern may be a fringe pattern. |
申请公布号 |
WO2015175702(A1) |
申请公布日期 |
2015.11.19 |
申请号 |
WO2015US30634 |
申请日期 |
2015.05.13 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
ZHAO, GUOHENG;STOKOWSKI, STANLEY E.;HILL, ANDREW;DE GREEVE, JOHAN;VAN DER BURGT, MAARTEN;VAN GILS, KAREL |
分类号 |
G01B11/25 |
主分类号 |
G01B11/25 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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