NONPOLYMERIC BINDERS FOR SEMICONDUCTOR SUBSTRATE COATINGS

摘要

PROBLEM TO BE SOLVED: To provide semiconductor coating compositions useful as bottom antireflective coatings.SOLUTION: Semiconductor coating compositions useful as aperture fill compositions and bottom antireflective coatings contain: (1) a nonpolymeric, binder (NPB) represented by formula (A), where Q is a multivalent organic nucleus, Zand Zare divalent linking groups, and W is a divalent organic bridging group; (2) a crosslinking agent; and (3) a solvent.