| 摘要 |
PROBLEM TO BE SOLVED: To curb reduction in detection accuracy.SOLUTION: A second substrate 50 is arranged on one surface 20a side of a first substrate 20. First drive piece control electrodes 34a and 35a of drive pieces 24 and 25 are formed on a part of a second substrate 50 side, and in a part facing displaceable areas of the drive pieces 24 and 25 of the second substrate 50, first drive piece auxiliary electrodes 52 and 53 are formed so as to sandwich capacitors CV1 and CV2 with the first drive piece control electrodes 34a and 35a. Then, on the basis of a capacitor to be configured between the first drive piece control electrodes 34a and 35a and the first drive piece auxiliary electrodes 52 and 53, a voltage is applied to the first drive piece control electrodes 34a and 35a so that a distance between the first drive piece control electrodes 34a and 35a and the first drive piece auxiliary electrodes 52 and 53 is constant. |
