发明名称 |
METHOD AND DEVICE FOR PRODUCING A MULTI-LAYER ELECTRODE SYSTEM |
摘要 |
A method for producing a multi-layer electrode system includes providing a carrier substrate having a recess in a top side of the carrier substrate. At least one wall of the recess is inclined in relation to a bottom side of the carrier substrate, which is opposite to the top side. The method also includes applying a multi-layer stack, which includes at least a first electrode layer, a second electrode layer, and a piezoelectric layer arranged between the first electrode layer and the second electrode layer, to the top side of the carrier substrate. At least the wall and a bottom of the recess are covered by at least a portion of the multi-layer stack. |
申请公布号 |
EP2943988(A1) |
申请公布日期 |
2015.11.18 |
申请号 |
EP20140702198 |
申请日期 |
2014.01.10 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
PIRK, TJALF;KRAUSS, ANDREAS;HEUCK, FRIEDJOF;LEIDICH, STEFAN;SCHELLING, CHRISTOPH |
分类号 |
H01L41/083;H01L41/27;H01L41/293 |
主分类号 |
H01L41/083 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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