ULTRASONIC TRANSDUCER ELEMENT CHIP AND PROBE, AND ELECTRONIC DEVICE AND ULTRASOUND DIAGNOSTIC EQUIPMENT

摘要

An ultrasonic transducer element chip characterized by including a substrate including opening arranged in an array pattern, ultrasonic transducer elements respectively disposed at the openings on a first surface of the substrate, a reinforcing member fixed on a second surface of the substrate opposite to the first surface of the substrate to reinforce the substrate, and a ventilation passage through which internal spaces of the openings and an external space of the substrate are in communication with each other.