| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a charged particle beam drawing device capable of detecting an error detected in a DAC amplifier also on a specimen, and a DAC amplifier evaluation method. <P>SOLUTION: A charged particle beam drawing device comprises: a blanking amplifier 33; DAC amplifiers 34, 35, and 36 which apply voltage to deflectors 47, 50, and 51; a deflection control unit 32; a control computer 31; and a DAC amplifier tester 7 which evaluates the DAC amplifiers 34, 35, and 36. The DAC amplifier tester 7 comprises: a counter 7j which receives index information related to a specimen M from the control computer 31; a display unit 7g which receives position information related to a position where the specimen M is irradiated with a charged particle beam B from the deflection control unit 32; and a control unit C which identifies an error occurrence location on the specimen M on the basis of the index information, the position information, and a shot signal from the blanking amplifier 33 when receiving an error signal from the DAC amplifier 34, 35, or 36. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
