| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter, an optical module, an optical analysis module, and a manufacturing method for a wavelength variable interference filter for allowing easy connection of a wire. <P>SOLUTION: A wavelength variable interference filter 5 includes: a first electrode 53, first electrode extraction parts 531L and 532L extending from the first electrode 53, and a third electrode extraction part 543L at least a part of which faces a second electrode extraction part 542L which are formed on a surface of a first substrate 51 that faces a second substrate 52; a second electrode 54 and the second electrode extraction part 542L extending from the second, which are formed on a surface of the second substrate 52 that faces the first substrate 51; an extraction part formation groove 515 provided with the second electrode extraction part 542L and the third electrode extraction part 543L; a penetration hole 524 that connects the extraction part formation groove 515 to the outside; and a conductive member disposed in the extraction part formation groove 515 connected to the penetration hole 524 and electrically connecting the second electrode extraction part 542L and the third electrode extraction part 543L. <P>COPYRIGHT: (C)2012,JPO&INPIT |
