| 摘要 |
<p>[Task] To provide a ferroelectric thin film-forming sol-gel solution which can be formed into a thick layer by being coated once using a sol-gel method, and can make a PZT film into a crack-free and dense film structure after calcination and firing when forming a PZT-based ferroelectric thin film. [Means for Resolution] When a ferroelectric thin film-forming sol-gel solution contains a PZT-based compound, a viscosity-adjusting macromolecular compound including polyvinylpyrrolidone, and an organic dopant including a formamide-based solvent, the PZT-based compound is included at 17 mass% or more in terms of an oxide, the molar ratio of the polyvinylpyrrolidone to the PZT-based compound is PZT-based compound:polyvinylpyrrolidone = 1:0.1 to 0.5 in terms of a monomer, and the formamide-based solvent is included at 3 mass% to 13 mass% of the sol-gel solution, it is possible to form a thick layer by coating the sol-gel solution once, the production efficiency improves, and crack-free and dense film formation even after calcination and firing becomes possible.</p> |
