| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a projection optical system in which the pattern of an original is projected onto a substrate while reducing the influence of planarity of a substrate by adjusting the focus position of the projection optical system. <P>SOLUTION: A projection optical system of the present invention that projects the image of the pattern of an original onto a substrate includes a plurality of optical transmission elements. The plurality of optical transmission elements have continuous surface shapes having periods different from each other. Focus is adjusted by shifting at least one of the plurality of optical transmission elements in the periodic direction. <P>COPYRIGHT: (C)2012,JPO&INPIT |
