INTEGRATED SUB-WAVELENGTH GRATING ELEMENT

摘要

An integrated sub-wavelength grating element includes a transparent layer formed over an optoelectronic substrate layer and a sub-wavelength grating element formed into a grating layer disposed on said transparent layer. The sub-wavelength grating element is formed in alignment with an active region of an optoelectronic component within the optoelectronic substrate layer. The sub-wavelength grating element affects light passing between said grating element and said active region. A method for forming an integrated sub-wavelength grating element is also provided.