发明名称 METHOD FOR MELTING SOLID RAW MATERIAL FOR SILICON SINGLE CRYSTAL GROWTH
摘要 The present invention relates to a method for melting a solid raw material for growing silicon single crystal using the Czochralski method. The method of the present invention comprises the following steps: (a) filling a solid raw material into a silica crucible; (b) selecting a location for maximum heat generation and measuring the distance between the location and the uppermost surface of a heater to set a reference value; (c) measuring a location value, which is a distance between the uppermost surface of the heater and the level of the surface of a raw material melted within the silica crucible; and (d) comparing the reference value with the location value, and moving up or down the silica crucible by a difference in the reference value and the location value so that the level of a location for maximum heat generation can be the same as the level of the surface of the solid raw material melted within the silica crucible. Therefore, when a solid raw material is melted, heat generated from the location for maximum heat generation can be transferred to the surface of a silicon solution to effectively melt the solid raw material from top to bottom within the silica crucible.
申请公布号 KR20150128040(A) 申请公布日期 2015.11.18
申请号 KR20140054753 申请日期 2014.05.08
申请人 LG SILTRON INCORPORATED 发明人 PARK, KYUNG TAE;PARK, JEONG HOON;NOH, TAE SIK
分类号 C30B15/14;C30B29/06 主分类号 C30B15/14
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