发明名称 |
Device for laser beam amplification |
摘要 |
<p>The device (21) has a booster chamber (22) with laser-active material such as carbon dioxide. A transmissive optical element (23) i.e. diamond window, defines the booster chamber, and is arranged perpendicular to an optical axis (26) of a laser beam (10) at tilt angle in an oriented plane. A detection unit (24) is arranged at outer side of the booster chamber, and detects transmission of back-reflected laser beam (27) on the optical element. A deflecting mirror turns the back-reflected laser beam on the detection unit.</p> |
申请公布号 |
EP2645494(B8) |
申请公布日期 |
2015.11.18 |
申请号 |
EP20130159399 |
申请日期 |
2013.03.15 |
申请人 |
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBH |
发明人 |
SCHULZ, JOACHIM;MUELLER, OLIVER |
分类号 |
H01S3/10;H01S3/034;H01S3/07;H01S3/223;H01S3/225 |
主分类号 |
H01S3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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