发明名称 Device for laser beam amplification
摘要 <p>The device (21) has a booster chamber (22) with laser-active material such as carbon dioxide. A transmissive optical element (23) i.e. diamond window, defines the booster chamber, and is arranged perpendicular to an optical axis (26) of a laser beam (10) at tilt angle in an oriented plane. A detection unit (24) is arranged at outer side of the booster chamber, and detects transmission of back-reflected laser beam (27) on the optical element. A deflecting mirror turns the back-reflected laser beam on the detection unit.</p>
申请公布号 EP2645494(B8) 申请公布日期 2015.11.18
申请号 EP20130159399 申请日期 2013.03.15
申请人 TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBH 发明人 SCHULZ, JOACHIM;MUELLER, OLIVER
分类号 H01S3/10;H01S3/034;H01S3/07;H01S3/223;H01S3/225 主分类号 H01S3/10
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